Reticle Inspection System With Simultaneous Dual Sided Inspection
Table top model is approximately 30" cube
Several units have been adapted for stockers and other system integration projects.
Masks; reticles; wafers; solar panels
KLA-Tencor Service; Applications; refurbishment; Lasers; Optics; Spares; FRU repairs
ADE; INSPEX; Leica; AMAT
Lasers from JDSU