Name & Type

Particle Detection System PDS 1020-G2

in Other Optics Instruments, Type: sell

Images & Seller Information
  • Particle Detection System PDS 1020-G2
  • KLA-Tencor service, spares, support, JDSU lasers.
    Support of other Semiconductor Metrology systems.
    New Particle detection Systems for Mask, reticle, solar, wafer and other applications.

Details
 Country Of Origin: United States
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Description

Reticle Inspection System  With Simultaneous Dual Sided Inspection

Table top model is approximately 30" cube

Several units have been adapted for stockers and other system integration projects.

Masks; reticles; wafers; solar panels

KLA-Tencor Service; Applications; refurbishment; Lasers; Optics; Spares; FRU repairs

ADE; INSPEX; Leica; AMAT

Calibration wafers

Lasers from JDSU

www.waferinspectionservices.com

 

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